Low-temperature crystallization of BST thin films on RT/Duroid substrate for tunable microwave devices

Akhil Raman T. S.; Shivakumar Chedurupalli; James Raju K. C.

doi:10.1117/12.2645993

31 January 2023 Low-temperature crystallization of BST thin films on RT/Duroid substrate for tunable microwave devices

Akhil Raman T. S., Shivakumar Chedurupalli, James Raju K. C.

Proceedings Volume 12477, International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors 2022; 124770Y (2023) https://doi.org/10.1117/12.2645993
Event: International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors, 2022, Boston, Massachusetts, United States

Abstract

Barium strontium titanate (BST-Ba_0.5Sr_0.5TiO₃) thin films are deposited over RT/Duroid substrate at a temperature of 250°C and are then crystallized by laser annealing. The laser annealed films are XRD crystalline. The microwave dielectric properties are measured by fabricating circular patch capacitor (CPC) using these dielectric films and a maximum tunability of 34% is obtained. Thus, integrated monolithic varactors on a polymer composite substrate exploiting the electric fielddependent dielectric constant exhibited by crystalline ferroelectric thin films are demonstrated.

Citation Download Citation

Akhil Raman T. S., Shivakumar Chedurupalli, and James Raju K. C. "Low-temperature crystallization of BST thin films on RT/Duroid substrate for tunable microwave devices", Proc. SPIE 12477, International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors 2022, 124770Y (31 January 2023); https://doi.org/10.1117/12.2645993

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