Hyperdoped Si thin films for infrared detection

Jay Mathews

doi:10.1117/12.2648363

31 January 2023 Hyperdoped Si thin films for infrared detection

Jay Mathews

Proceedings Volume 12477, International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors 2022; 124770C (2023) https://doi.org/10.1117/12.2648363
Event: International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors, 2022, Boston, Massachusetts, United States

Abstract

Hyperdoped Si materials extend Si response range into near infrared by forming intermediate band in Si band gap. Ti hyperdoped Si (Si:Ti) has been demonstrated to have subbandgap photo response. In this work, we fabricated and characterized Si:Ti photodiodes and optimized the structure. At room temperature, the 3.5×10^-3 EQE has been obtained at telecommunication wavelength 1550nm. And the detectable response extends until 2250nm. The results show the potential of Si:Ti materials being both Si:Ti photovoltaics and commercialized IR detection. To improve the efficiency of Si:Ti photodetectors, the affection of absorption rate, devices structure and the Si:Ti crystal quality is discussed.

Citation Download Citation

Jay Mathews "Hyperdoped Si thin films for infrared detection", Proc. SPIE 12477, International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors 2022, 124770C (31 January 2023); https://doi.org/10.1117/12.2648363

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