Modeling and experimental investigation of novel 1D resonant MEMs scanner

Wenhao Chen; Mingzheng Duan; Hadi Tavakkoli; Huahuang Luo; Wibool Piyawattanametha; Yi-Kuen Lee

doi:10.1117/12.2651330

17 March 2023 Modeling and experimental investigation of novel 1D resonant MEMs scanner

Wenhao Chen, Mingzheng Duan, Hadi Tavakkoli, Huahuang Luo, Wibool Piyawattanametha, Yi-Kuen Lee

Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII; 124340I (2023) https://doi.org/10.1117/12.2651330
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

A novel CMOS-MEMS staggered vertical comb-based micro scanner using 0.18um 1P6M CMOS foundry process without wafer bonding has been successfully developed. A compact model consisting of both numerical simulations and analytical solutions is used for rapid design optimization. An optimized design with enhanced performance (rotation angle and figure of merit) as well as a critical ratio for improving actuators’ input-output response is proposed. The proposed CMOS-MEMS micro scanner can be very useful for developing next-generation optical MEMS devices.

Conference Presentation

Citation Download Citation

Wenhao Chen, Mingzheng Duan, Hadi Tavakkoli, Huahuang Luo, Wibool Piyawattanametha, and Yi-Kuen Lee "Modeling and experimental investigation of novel 1D resonant MEMs scanner", Proc. SPIE 12434, MOEMS and Miniaturized Systems XXII, 124340I (17 March 2023); https://doi.org/10.1117/12.2651330

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