Optimization processes for three-dimensional microprinting of glass micro-optics

Chang Tan; Phuong-Ha Cu-Nguyen; Hans Zappe

doi:10.1117/12.2656190

15 March 2023 Optimization processes for three-dimensional microprinting of glass micro-optics

Chang Tan, Phuong-Ha Cu-Nguyen, Hans Zappe

Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII; 1243407 (2023) https://doi.org/10.1117/12.2656190
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Recent results for flexible manufacturing of fused silica micro-optics using a surface optimization process are presented. Selective laser-induced etching technology (SLE) is used to fabricate highly precise microstructured glass components while thermal annealing is used to smoothen the optical surfaces. An optimization process for SLE printing and thermal annealing is investigated using a response surface methodology. Fabrication parameters such as laser power, writing velocity in the SLE process, as well as annealing temperature and thermal anneal time are varied to minimize the average surface roughness of the glass components. The optimization results show that the average surface roughness of printed glass is reduced from >500nm to ∼ 10nm in an area with a diameter of 250 μm, allowing the process to be used for optical applications.

Conference Presentation

Citation Download Citation

Chang Tan, Phuong-Ha Cu-Nguyen, and Hans Zappe "Optimization processes for three-dimensional microprinting of glass micro-optics", Proc. SPIE 12434, MOEMS and Miniaturized Systems XXII, 1243407 (15 March 2023); https://doi.org/10.1117/12.2656190

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