Low-power contactless button system based on MEMS ScAlN pyroelectric detector

Linfang Xu; Doris K. T. Ng; Weiguo Chen; Nanxi Li; Chong Pei Ho; Duan Jian Goh; Yao Zhang; Qingxin Zhang; Lennon Y. T. Lee

doi:10.1117/12.2648806

15 March 2023 Low-power contactless button system based on MEMS ScAlN pyroelectric detector

Linfang Xu, Doris K. T. Ng, Weiguo Chen, Nanxi Li, Chong Pei Ho, Duan Jian Goh, Yao Zhang, Qingxin Zhang, Lennon Y. T. Lee

Author Affiliations +

Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII; 1243405 (2023) https://doi.org/10.1117/12.2648806
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We demonstrate a system-level low-power contactless button using MEMS ScAlN-based pyroelectric detector. As pyroelectric detectors can sense instantaneous temperature change, the human finger can act as a thermal source to activate the button. Using our in-house fabricated ScAlN-based pyroelectric detector which does not require any IR source, we package it into a contactless button system designed with electrical read-out circuits and signal processing. This contactless button system could detect the presence of a finger at a center distance measured up to ~4 cm away, ~2 cm radius circle area, suitable for application as contactless elevator button. Our contactless button system using ScAlN-based pyroelectric effect is characterized, tested and compared with a commercial contactless button. The power consumed is measured ~3.5× lower than that of commercial contactless button. The results obtained provide a potential solution towards energy efficient low-power contactless button system.

Conference Presentation

Citation Download Citation

Linfang Xu, Doris K. T. Ng, Weiguo Chen, Nanxi Li, Chong Pei Ho, Duan Jian Goh, Yao Zhang, Qingxin Zhang, and Lennon Y. T. Lee "Low-power contactless button system based on MEMS ScAlN pyroelectric detector", Proc. SPIE 12434, MOEMS and Miniaturized Systems XXII, 1243405 (15 March 2023); https://doi.org/10.1117/12.2648806

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