Robust nano-antenna metrology for metasurface design

Cécile Le Gall; Bastien Rouze; Cindy Bellanger; Jérôme Primot; Julien Jaeck

doi:10.1117/12.2649854

15 March 2023 Robust nano-antenna metrology for metasurface design

Cécile Le Gall, Bastien Rouze, Cindy Bellanger, Jérôme Primot, Julien Jaeck

Proceedings Volume 12430, Quantum Sensing and Nano Electronics and Photonics XIX; 124300Y (2023) https://doi.org/10.1117/12.2649854
Event: SPIE OPTO, 2023, San Francisco, California, United States

Conference Poster

Abstract

Meta-optics allow the realization of new optical functions that are increasingly complex to realize and characterize locally. This is why we propose an interferometric method of systematic wavefront metrology of the meta-elements constituting a metasurface. This technique will allow the design of a library of nano-antennas, characterized in phase and amplitude. Once constituted, this library will allow the design of more complex optical functions. Tested for MIM (Metal-Isolating-Metal) metasurfaces, this technique can be applied to all metasurfaces.

Citation Download Citation

Cécile Le Gall, Bastien Rouze, Cindy Bellanger, Jérôme Primot, and Julien Jaeck "Robust nano-antenna metrology for metasurface design", Proc. SPIE 12430, Quantum Sensing and Nano Electronics and Photonics XIX, 124300Y (15 March 2023); https://doi.org/10.1117/12.2649854

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