CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 12409 > Article
Presentation
17 March 2023 Microfabrication of ITO transparent conductive film and formation of micro-metal grid structure
Akira Watanabe, Ashiqur Rahman, Megumi Komada
Author Affiliations +
Proceedings Volume 12409, Laser-based Micro- and Nanoprocessing XVII; 124090H (2023) https://doi.org/10.1117/12.2648717
Event: SPIE LASE, 2023, San Francisco, California, United States
Abstract
ITO (Tin Indium Oxide) is a typical transparent conductive material which is widely used in various electronic devices. One of the challenges in next-generation electronic devices is a flexible and wearable device in ICT (information and communication technology). The cracking during bending is a disadvantage of ITO film in the application to a folding display. In this paper, we report the concept of the formation of a flexible transparent electrode based on an ITO microstructure-metal grid hybrid which has a high bending durability and the formation of the ITO microstructure-metal grid hybrid by combination of laser ablation and lift-off process.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Akira Watanabe, Ashiqur Rahman, and Megumi Komada "Microfabrication of ITO transparent conductive film and formation of micro-metal grid structure", Proc. SPIE 12409, Laser-based Micro- and Nanoprocessing XVII, 124090H (17 March 2023); https://doi.org/10.1117/12.2648717
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Transparent conducting films
Microfabrication
Electronic components
Laser processing
Metals
Printed circuit board testing
Pulsed laser operation
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top