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We present a HHG-based XUV source providing large photon flux across a wide range between 40 eV and 150 eV. It is driven by an industrial-grade TruMicro 2030 20-W average power laser system delivering up to 100 µJ at <400-fs pulse duration. A post-compression unit is part of the device to shorten the pulses to approx. 40 fs at only 10% average power loss. The turnkey source provides photon flux of >10^10 photons/s near 70 eV.
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Christian Grebing, Maxim Tschernajew, Evgeny Shestaev, Christian Gaida, Sven Breitkopf, Oliver Herrfurth, Tino Eidam, Jens Limpert, "Industrial-grade high-harmonic generation," Proc. SPIE 12400, Fiber Lasers XX: Technology and Systems, 1240015 (9 March 2023); https://doi.org/10.1117/12.2649517