A new high-precision device for one-dimensional grating period measurement

Yuda Chen; Changhe Zhou; Yihan Wang; Xingxue Li; Wei Jia; Jin Wang

doi:10.1117/12.2642155

19 December 2022 A new high-precision device for one-dimensional grating period measurement

Yuda Chen, Changhe Zhou, Yihan Wang, Xingxue Li, Wei Jia, Jin Wang

Proceedings Volume 12318, Holography, Diffractive Optics, and Applications XII; 1231810 (2022) https://doi.org/10.1117/12.2642155
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

This paper introduces a new device for one-dimensional grating period measurement with high accuracy. The scheme includes two subsystems: a grating interferometer and a laser interferometer. As the grating moves, the grating interferometer obtains periodic signal related to the grating period, while the laser interferometer measures the displacement simultaneously. The grating period is then obtained through data processing and least-square-fitting. Most of the grating period measurement devices have scattered structures, poor stability, which could be affected by the environment easily. In order to overcome this shortcoming, we adopt the structure of glued prisms, which is compact, and will significantly improve the stability of the system. Thus, the scheme has advantages in measurement accuracy as well as resolution. The system benefits from simple structure and cheap components, which can be widely used in grating period measurement technology.

Citation Download Citation

Yuda Chen, Changhe Zhou, Yihan Wang, Xingxue Li, Wei Jia, and Jin Wang "A new high-precision device for one-dimensional grating period measurement", Proc. SPIE 12318, Holography, Diffractive Optics, and Applications XII, 1231810 (19 December 2022); https://doi.org/10.1117/12.2642155

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available