Paper
8 July 2022 Multiple Fano resonances based on all-dielectric metasurface for optical refractive index sensor
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Abstract
Fano resonance with high quality (Q) factor is of great significance to enhance the interaction between light and matter. The all-dielectric metasurface has low loss and can be used to realize the Fano resonance with high Q-factor. Herein , we propose a novel metasurface and apply it to the optical refractive index sensor in the near infrared. It consists of a silicon layer based on four rectangular holes and the substrate is silica. By introducing a new rectangular hole, the symmetry of the structure is broken and two new Fano resonance peaks are excited at the same time. The maximum Q-factor is 7709 (at 1304.4 nm). It can be applied to optical refractive index sensor with sensitivity of 296.7 nm/RIU and FOM of 1483.5.
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Ziang Gao, Shilin Yu, Yusen Wang, and Tonggang Zhao "Multiple Fano resonances based on all-dielectric metasurface for optical refractive index sensor", Proc. SPIE 12283, 2021 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices, 122830A (8 July 2022); https://doi.org/10.1117/12.2616511
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KEYWORDS
Refractive index

Magnetism

Sensors

Electromagnetism

Resonance enhancement

Silicon

Finite-difference time-domain method

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