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A coded-mask-based X-ray wavefront sensing technique was recently developed at the Advanced Photon Source, aiming for the ultimate phase sensitivity, spatial resolution and high speed using deep-learning-based analysis. It is a versatile tool capable of single-shot reference-free measurements and scanning mode for the best resolution and noise robustness. This work extends its application in at-wavelength metrology to achieve variable-resolution analysis when combined with a short-focal-length focusing optic. We showcase the complete characterization of beryllium refractive lenses using the coded-mask-based method in a collimated-beam setup and a divergent-beam setup with large geometric magnifications. The collimated-beam measurement provides the lens thickness error over the entire optical aperture down to a micron spatial resolution. On the other hand, wavefront sensing with the divergent beam can provide detailed local information of the sample with a few tens of nanometer spatial resolution, ideal for investigating lens defects.
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Xianbo Shi, Zhi Qiao, Matthew Highland, Matthew Frith, Luca Rebuffi, Lahsen Assoufid, "Advanced variable-resolution at-wavelength metrology with a coded-mask-based x-ray wavefront sensor," Proc. SPIE 12240, Advances in X-Ray/EUV Optics and Components XVII, 122400H (4 October 2022); https://doi.org/10.1117/12.2635694