Theoretical analysis of retrace error in Fizeau interferometer for deformed optical flats

Xiangyu Wei; Rong Su; Feng Tang; Xiangzhao Wang

doi:10.1117/12.2626352

27 March 2022 Theoretical analysis of retrace error in Fizeau interferometer for deformed optical flats

Xiangyu Wei, Rong Su, Feng Tang, Xiangzhao Wang

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 12169AY (2022) https://doi.org/10.1117/12.2626352
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

Laser Fizeau interferometers are widely used for surface form metrology for optics and silicon wafers. The reference beam and sample beam share a common optical path in Fizeau interferometer when measuring a non-tilted optical flat. However, in the process of measuring surface topography of a wafer, as the form of a wafer often deviates from an ideal flat, such as surface warping caused by the manufacturing process, the so-called retrace error may occur due to the violation of the common path condition. In this paper, we establish two ray tracing models that correspond to the home-built Fizeau interferometer in our lab, and find that the retrace error only occurs in the presence of optical aberrations in the interferometer. In addition, we study the effect of the variation of the wafer surface form on the retrace error by superposing different Zernike polynomials on the flat surface. Based on the simulation results, the tolerance for aberrations in the specific Fizeau interferometer is provided.

Citation Download Citation

Xiangyu Wei, Rong Su, Feng Tang, and Xiangzhao Wang "Theoretical analysis of retrace error in Fizeau interferometer for deformed optical flats", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 12169AY (27 March 2022); https://doi.org/10.1117/12.2626352

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KEYWORDS

Fizeau interferometers

Semiconducting wafers

Monochromatic aberrations

Error analysis

Silicon

Wafer-level optics

Wavefronts

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