Laser-based techniques for micro-optics and photonics

Kernius Vilkevičius; Vita Petrikaite; Rodrigas Liudvinavičius; Evaldas Stankevičius

doi:10.1117/12.2606574

5 March 2022 Laser-based techniques for micro-optics and photonics

Kernius Vilkevičius, Vita Petrikaite, Rodrigas Liudvinavičius, Evaldas Stankevičius

Proceedings Volume 12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV; 1201204 (2022) https://doi.org/10.1117/12.2606574
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

Here, the structures fabricated using direct laser writing and interference lithography techniques are demonstrated. By the tightly focused femtosecond laser beam in the thin gold film, various structures such as the gold bumps, needles, or cones can be fabricated. The shape of the gold structures depends on the used laser pulse energy. By the treatment of the thin films using nanosecond laser pulses, the direct synthesis of nanoparticles on the glass substrate can be realized. The laser processing of photopolymers enables the formation of structures suitable for micro-optics.

Conference Presentation

Citation Download Citation

Kernius Vilkevičius, Vita Petrikaite, Rodrigas Liudvinavičius, and Evaldas Stankevičius "Laser-based techniques for micro-optics and photonics", Proc. SPIE 12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV, 1201204 (5 March 2022); https://doi.org/10.1117/12.2606574

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