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The stacked-actuator deformable mirror with a high spatial resolution of the control elements was developed. The key advantage of such a mirror is its simplicity of design, thanks to the use of piezoceramic combs. Each comb consists of 5 piezo actuators arranged in a row. By assembling such combs on a piezoceramic base, it is possible to obtain the desired geometry of the control elements of the piezoactuator mirror. On an aperture of 50 * 50 mm, 100 actuators were placed in a rectangular configuration, on which a reflective substrate with a thickness of 1 mm was glued. A deformation of the mirror of 4.5 μm was obtained under the action of a control voltage of +300 V.
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Vladimir Toporovskiy, Alexis Kudryashov, Vadim Samarkin, Anatoliy Panich, Alexander Sokallo, Anatoliy Malykhin, "Investigation of properties of the stacked-actuator deformable mirror made of the piezoceramic combs," Proc. SPIE 11916, 27th International Symposium on Atmospheric and Ocean Optics, Atmospheric Physics, 119161I (15 December 2021); https://doi.org/10.1117/12.2603503