Developing optomechanical inertial sensors

Ying Lia Li

doi:10.1117/12.2601352

6 October 2021 Developing optomechanical inertial sensors

Ying Lia Li

Proceedings Volume 11880, Emerging Applications in Silicon Photonics II; 118800A (2021) https://doi.org/10.1117/12.2601352
Event: SPIE Photonex, 2021, Glasgow, United Kingdom

Abstract

Silicon photonics can be used to create compact high performance optical inertial sensors by combining photonic integrated circuit structures with micro-electro-mechanical systems engineering. Optically transduced mechanical test-masses benefit from the low noise and long-term stability of stabilised coherent light sources, enabling lower noise floors and improved bias stability compared with capacitive devices. By using optical resonances in the form of whispering gallery modes (WGM) to perform the measurement, we further boost the signal-to-noise ratio of our readout. The dispersive optomechanical coupling between the WGM within a ring resonator and the motion of the test-mass causes a measurable shift to the resonance. We report on progress towards creating an optomechanical accelerometer from silicon-on-insulator wafers, targeting a noise floor of < 1×10^-6 ms^-2/Hz^1/2.

Citation Download Citation

Ying Lia Li "Developing optomechanical inertial sensors", Proc. SPIE 11880, Emerging Applications in Silicon Photonics II, 118800A (6 October 2021); https://doi.org/10.1117/12.2601352

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