Ultrafine figuring for glue-free deformable mirror

Yoshio Ichii; Hiromi Okada; Shinya Aono; Masahiko Kanaoka; Takato Inoue; Satoshi Matsuyama; Kazuto Yamauchi

doi:10.1117/12.2594418

1 August 2021 Ultrafine figuring for glue-free deformable mirror

Yoshio Ichii, Hiromi Okada, Shinya Aono, Masahiko Kanaoka, Takato Inoue, Satoshi Matsuyama, Kazuto Yamauchi

Proceedings Volume 11837, Advances in X-Ray/EUV Optics and Components XVI; 1183708 (2021) https://doi.org/10.1117/12.2594418
Event: SPIE Optical Engineering + Applications, 2021, San Diego, California, United States

Abstract

PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard x-ray regimes[1], however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. Therefore, we have developed a glue-free bimorph deformable mirror, in which silver nanoparticles were employed to bond PZT actuators to mirror substrates[2]. In this study, we achieved a 2 nm figure error on an elliptical shape of a glue-free deformable mirror. We evaluated the figure change characteristics due to humidity and temperature increasing at the ultrafine figure error condition.

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Citation Download Citation

Yoshio Ichii, Hiromi Okada, Shinya Aono, Masahiko Kanaoka, Takato Inoue, Satoshi Matsuyama, and Kazuto Yamauchi "Ultrafine figuring for glue-free deformable mirror", Proc. SPIE 11837, Advances in X-Ray/EUV Optics and Components XVI, 1183708 (1 August 2021); https://doi.org/10.1117/12.2594418

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