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Understanding how inducing molecular alignment can influence pyrolytic carbon microstructure and functionality is consequential for carbon MEMS microfabrication and applicability. We present a comparative analysis on the effects of compressive stress versus standard tensile treatment of carbon precursors. Different characterization techniques reveal that while subjecting precursor molecules to both types of mechanical stresses will induce graphitization in the pyrolytic carbon, this effect is more pronounced in compressive stress. MEMS functionality of the two carbons was evaluated by characterizing the electrochemical performance of their electrodes. Both carbons exhibited enhanced electrochemical performances. However, the heterogeneous electron transfer rate derived from CV diagrams reveals compression-activated electrode to have remarkably faster kinetics. The results show the versatility of pyrolytic nanocarbons and a synthesis route to tailor functionality for MEMS and Sensors.
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Maziar Ghazinejad, Yujia Liu, Edmund Lau, Marc Madou, Dario Mager, "Tuning microstructure and characteristics of carbon nanofibers by stress-induced graphitization," Proc. SPIE 11800, Low-Dimensional Materials and Devices 2021, 1180003 (4 August 2021); https://doi.org/10.1117/12.2595005