Semi-analytic modeling of diffraction grating BRDF using scalar Fourier optics

Felix Koch; Matthias Zilk; Tilman Glaser

doi:10.1117/12.2591771

20 June 2021 Semi-analytic modeling of diffraction grating BRDF using scalar Fourier optics

Felix Koch, Matthias Zilk, Tilman Glaser

Author Affiliations +

Proceedings Volume 11783, Modeling Aspects in Optical Metrology VIII; 1178304 (2021) https://doi.org/10.1117/12.2591771
Event: SPIE Optical Metrology, 2021, Online Only

Abstract

The signal-to-noise ratio and imaging performance of optical instruments is often limited by instrumental straylight. In the case of state-of-the-art spectrometers, scattered light level of the diffraction grating, quantified in terms of its BRDF, remains the main cause. It is therefore essential for the designer to estimate the scattering behavior of diffraction gratings realistically. We thus developed a simple semi-analytical model based on scalar Fourier optics. In this framework, the BRDF is shown to be proportional to the angular spectrum of plane waves emanating from the grating aperture function. The model can easily incorporate different manufacturing errors of real gratings that are specific for the most common mastering methods, i.e. holographic lithography and mechanical ruling. The influence of the most important manufacturing errors is demonstrated and BRDF functions based on the model are compared to measurements from real holographic and mechanically ruled diffraction gratings.

Conference Presentation

Citation Download Citation

Felix Koch, Matthias Zilk, and Tilman Glaser "Semi-analytic modeling of diffraction grating BRDF using scalar Fourier optics", Proc. SPIE 11783, Modeling Aspects in Optical Metrology VIII, 1178304 (20 June 2021); https://doi.org/10.1117/12.2591771

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