Low-loss silicon optical modulator using doping compensation method at 2 μm wavelength band

Heming Hu; Xindan Zhang; Miaomiao Gu; Yufei Liu; Lianxi Jia; Song Feng; Qing Fang; Hua Chen

doi:10.1117/12.2589029

18 March 2021 Low-loss silicon optical modulator using doping compensation method at 2 μm wavelength band

Heming Hu, Xindan Zhang, Miaomiao Gu, Yufei Liu, Lianxi Jia, Song Feng, Qing Fang, Hua Chen

Proceedings Volume 11780, Global Intelligent Industry Conference 2020; 117800C (2021) https://doi.org/10.1117/12.2589029
Event: Global Intelligent Industry Conference 2020, 2020, Guangzhou, China

Abstract

Compared with the optical modulator based on 1310 nm and 1550 nm wavelength band, the silicon-based modulator at 2 μm band has a higher absorption loss, since the free carrier effect is more significant in the 2 μm band. In this paper, we demonstrate an optical modulator at 2 μm wavelength band, using a doping compensation method. We reduce absorption loss and keep the modulation extinction ratio at a high level through optimizing waveguide width, PN junction offset and compensated area. With doping compensation, the modulator has an absorption loss by PN junction of 2.8 dB/cm at 0 V and an extinction ratio of 14.2 dB at bitrates of 40 Gb/s.

Citation Download Citation

Heming Hu, Xindan Zhang, Miaomiao Gu, Yufei Liu, Lianxi Jia, Song Feng, Qing Fang, and Hua Chen "Low-loss silicon optical modulator using doping compensation method at 2 μm wavelength band", Proc. SPIE 11780, Global Intelligent Industry Conference 2020, 117800C (18 March 2021); https://doi.org/10.1117/12.2589029

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