Electro-optical measuring system for quality assurance of novel nanowire surfaces

Malte Nickel; Ubbo Ricklefs; Jochen Frey

doi:10.1117/12.2588979

18 April 2021 Electro-optical measuring system for quality assurance of novel nanowire surfaces

Malte Nickel, Ubbo Ricklefs, Jochen Frey

Proceedings Volume 11772, Optical Sensors 2021; 117721C (2021) https://doi.org/10.1117/12.2588979
Event: SPIE Optics + Optoelectronics, 2021, Online Only

Conference Poster

Abstract

Nano surfaces offer exciting opportunities to implement novel technologies. The effort involved in producing these surfaces is particularly high in terms of the required quality. At the same time, meeting these high standards is often difficult, as it presents the necessary measurement technology with special challenges. In this paper, several measurement methods are shown in order to examine and compare new types of nano-surfaces for contacting for their quality, not only in nano-scale but in large-scale without the need of high resolution methods as SEM.

Conference Presentation

Citation Download Citation

Malte Nickel, Ubbo Ricklefs, and Jochen Frey "Electro-optical measuring system for quality assurance of novel nanowire surfaces", Proc. SPIE 11772, Optical Sensors 2021, 117721C (18 April 2021); https://doi.org/10.1117/12.2588979

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