Miniaturization of NIR/SWIR image sensors enabled by thin-film photodiode monolithic integration

Pawel E. Malinowski; Jiwon Lee; Yunlong Li; Epimitheas Georgitzikis; Vladimir Pejovic; Itai Lieberman; Tom Verschooten; Steven Thijs; Orges Furxhi; Paul Heremans; David Cheyns

doi:10.1117/12.2584144

27 March 2021 Miniaturization of NIR/SWIR image sensors enabled by thin-film photodiode monolithic integration

Pawel E. Malinowski, Jiwon Lee, Yunlong Li, Epimitheas Georgitzikis, Vladimir Pejovic, Itai Lieberman, Tom Verschooten, Steven Thijs, Orges Furxhi, Paul Heremans, David Cheyns

Author Affiliations +

Proceedings Volume 11765, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II; 117650V (2021) https://doi.org/10.1117/12.2584144
Event: SPIE AR VR MR, 2021, Online Only

Abstract

In this paper, we present short-wave infrared (SWIR) image sensors with high pixel density. Quantum dot (QD) photodiode stack is monolithically integrated on custom, 130 nm node CMOS readout circuit. State-of-the-art pixel pitch of 1.82 μm is demonstrated in focal plane arrays sensitive at eye-safe region above 1400 nm wavelength. Thin-film photodiode (TFPD) technology will facilitate realization of ultra-compact SWIR sensors for future XR applications, including eye-safe tracking systems and enhanced vision.

Conference Presentation

Citation Download Citation

Pawel E. Malinowski, Jiwon Lee, Yunlong Li, Epimitheas Georgitzikis, Vladimir Pejovic, Itai Lieberman, Tom Verschooten, Steven Thijs, Orges Furxhi, Paul Heremans, and David Cheyns "Miniaturization of NIR/SWIR image sensors enabled by thin-film photodiode monolithic integration", Proc. SPIE 11765, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II, 117650V (27 March 2021); https://doi.org/10.1117/12.2584144

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available