Compact and low power silicon photonic components based on MEMS

Kristinn B. Gylfason; Pierre Edinger; Carlos Errando-Herranz; Alain Takabayashi; Hamed Sattari; Niels Quack; Peter Verheyen; Wim Bogaerts

doi:10.1117/12.2582947

8 March 2021 Compact and low power silicon photonic components based on MEMS

Kristinn B. Gylfason, Pierre Edinger, Carlos Errando-Herranz, Alain Takabayashi, Hamed Sattari, Niels Quack, Peter Verheyen, Wim Bogaerts

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Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 116970Y (2021) https://doi.org/10.1117/12.2582947
Event: SPIE OPTO, 2021, Online Only

Abstract

We review our recent work on compact and low power silicon photonic components based on microelectromechanical systems (MEMS) and implemented in imec’s iSiPP50G foundry platform. Large scale reconfigurability is attractive for emerging applications such as photonic accelerators for AI workloads. However, the large power consumption and footprint of current components prohibits scaling to large circuits. Silicon MEMS offer 10000x lower power consumption, a small footprint, and excellent mechanics. We show phase shifters, couplers, and wavelength filters . The devices have small footprints of a few tens of micrometers per side, low insertion losses of the order of 0.1 dB and time constants of the order of 1 µs.

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Kristinn B. Gylfason, Pierre Edinger, Carlos Errando-Herranz, Alain Takabayashi, Hamed Sattari, Niels Quack, Peter Verheyen, and Wim Bogaerts "Compact and low power silicon photonic components based on MEMS", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 116970Y (8 March 2021); https://doi.org/10.1117/12.2582947

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