CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN

Doris K. T. Ng; Chong-Pei Ho; Tantan Zhang; Linfang Xu; Li-Yan Siow; Wing-Wai Chung; Hong Cai; Lennon Y. T. Lee; Qingxin Zhang; Navab Singh

doi:10.1117/12.2582707

5 March 2021 CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN

Doris K. T. Ng, Chong-Pei Ho, Tantan Zhang, Linfang Xu, Li-Yan Siow, Wing-Wai Chung, Hong Cai, Lennon Y. T. Lee, Qingxin Zhang, Navab Singh

Author Affiliations +

Proceedings Volume 11697, MOEMS and Miniaturized Systems XX; 116970N (2021) https://doi.org/10.1117/12.2582707
Event: SPIE OPTO, 2021, Online Only

Abstract

We present the optical and electrical properties of AlN-based and 12% doped ScAlN-based pyroelectric detectors fabricated on 8-inch wafers respectively. Both AlN and ScAlN materials are deposited at a temperature of ~200^oC, making them potential candidates for CMOS compatible MEMS pyroelectric detectors. FTIR spectroscopy is used to measure the absorption of these pyroelectric detectors over the wavelength range of ~2–14 μm and the results show absorption improvement up to ~75% for ScAlN-based pyroelectric detectors compared to that of AlN-based pyroelectric detectors at the wavelength of 4.26 μm where CO₂ gas absorption of IR radiation is anticipated. Higher output current (~3-fold increase) is also observed from ScAlN-based pyroelectric detectors. Other than pyroelectric coefficient that contributes to improved performance for ScAlN-based pyroelectric detectors, we believe that absorptivity of the device also plays a major role in the performance of pyroelectric IR detectors. The results obtained from the study of the electrical and optical properties of AlN-based and ScAlN-based CMOS compatible MEMS pyroelectric detectors will bring forth potential applications of these detectors onto multi-functional integrable and monolithic platforms.

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Doris K. T. Ng, Chong-Pei Ho, Tantan Zhang, Linfang Xu, Li-Yan Siow, Wing-Wai Chung, Hong Cai, Lennon Y. T. Lee, Qingxin Zhang, and Navab Singh "CMOS compatible MEMS pyroelectric infrared detectors: from AlN to ScAlN", Proc. SPIE 11697, MOEMS and Miniaturized Systems XX, 116970N (5 March 2021); https://doi.org/10.1117/12.2582707

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