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First focus when developing imprint materials for optical applications is on their optical properties. However other properties are also key. Here we focus on the thermo-mechanical properties of polymer-based imprint materials and their importance for various applications. Special emphasis will be put on thermo-mechanical stress induced by thermal mismatch. We’ll compare thermo-mechanical bulk properties of such materials with results from FEM simulations and experimental tests.
Patrick Heissler,Markus Brehm,Isabel Pilottek, andMartin Bues
"Design of thermo-mechanical properties of highly reliable, UV-curable optical polymers", Proc. SPIE 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV, 116960W (5 March 2021); https://doi.org/10.1117/12.2577676
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Patrick Heissler, Markus Brehm, Isabel Pilottek, Martin Bues, "Design of thermo-mechanical properties of highly reliable, UV-curable optical polymers," Proc. SPIE 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV, 116960W (5 March 2021); https://doi.org/10.1117/12.2577676