Maxim Tschernajew,1 Steffen Haedrich,1 Robert Klas,2,3 Martin Gebhardt,2,3 Roland Horsten,4 Sven Weerdenburghttps://orcid.org/0000-0002-8966-9557,4 Sergey Pyatchenkov,4 Wim Coene,4,5 Christian Gaida,1 Sven Breitkopf,1 Jan Rothhardt,2,3 Tino Eidam,1 Jens Limpert1,6,7
1Active Fiber Systems GmbH (Germany) 2Friedrich-Schiller-Univ. Jena (Germany) 3Helmholtz-Institute Jena (Germany) 4Technische Univ. Delft (Netherlands) 5ASML Netherlands B.V (Netherlands) 6Institute of Applied Physics, Abbe Center of Photonics, Friedrich-Schiller-Universität Jena (Germany) 7Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
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High harmonic generation at high repetition rate is realized with a high average power 100W, 600kHz fiber laser system. Optimization is done for two different operation regimes. At 69-75eV the source delivers a world-record photon flux of >10^11photons/s/harmonic when using argon gas jets. The use of neon gas allows for operation at significantly shorter wavelength. The important 93eV harmonic can be generated at 5·10^9 photons/s/(1% bandwidth), while even higher values of >10^10 photons/s/(1% bandwidth) are achieved between 115-140eV. The HHG source provides excellent long-term power stability of ~1% RMS for each of the operation regimes.
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Maxim Tschernajew, Steffen Haedrich, Robert Klas, Martin Gebhardt, Roland Horsten, Sven Weerdenburg, Sergey Pyatchenkov, Wim Coene, Christian Gaida, Sven Breitkopf, Jan Rothhardt, Tino Eidam, Jens Limpert, "High repetition rate high harmonic generation with ultra-high photon flux," Proc. SPIE 11676, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXI, 116761C (5 March 2021); https://doi.org/10.1117/12.2577496