Programmable directed micro-assembly

Eugene Chow; Brad Rupp; Jeng Ping Lu; Anne Plochowietz; Lara Crawford; Yunda Wang; Sourobh Raychaudhuri; David Biegelsen

doi:10.1117/12.2583479

22 February 2021 Programmable directed micro-assembly

Eugene Chow, Brad Rupp, Jeng Ping Lu, Anne Plochowietz, Lara Crawford, Yunda Wang, Sourobh Raychaudhuri, David Biegelsen

Author Affiliations +

Proceedings Volume 11610, Novel Patterning Technologies 2021; 116100D (2021) https://doi.org/10.1117/12.2583479
Event: SPIE Advanced Lithography, 2021, Online Only

Abstract

We aim to develop the capability to rapidly sort, place, and orient micro objects into custom positions and transfer them to a final substrate eventually at costs similar to laser printers assembling toner particles onto paper. We are using programmable directed electrostatic parallel control to move particles from random to ordered patterns. Such a process could enable significantly more heterogeneity, complexity and customizability in material and device integration. We summarize experimental results including assembly and transfer microchip and microbeads at the 1um to 250um size scale, combined with transfer (including roll-roll based) to a final substrate.

Conference Presentation

Citation Download Citation

Eugene Chow, Brad Rupp, Jeng Ping Lu, Anne Plochowietz, Lara Crawford, Yunda Wang, Sourobh Raychaudhuri, and David Biegelsen "Programmable directed micro-assembly", Proc. SPIE 11610, Novel Patterning Technologies 2021, 116100D (22 February 2021); https://doi.org/10.1117/12.2583479

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available