Modeling and simulation of dynamic errors in a coordinate measuring machine with 3-DOF laser interferometer

Haoyu Lyu; Lingbao Kong

doi:10.1117/12.2580162

5 November 2020 Modeling and simulation of dynamic errors in a coordinate measuring machine with 3-DOF laser interferometer

Haoyu Lyu, Lingbao Kong

Author Affiliations +

Proceedings Volume 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing; 115681L (2020) https://doi.org/10.1117/12.2580162
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China

Abstract

In this paper, by constructing a 3-DOF (Degrees of freedom) laser interferometer on each displacement axis of motion, the main errors during the coordinate measuring machines (CMM) motion are dynamically monitored. The 3-DOF laser interferometer is composed of three-beam dual-frequency laser interferometers, and each dual-frequency laser interferometer obtains the reflection signal through a corner cube reflector. By determining the position parameters of the three corner cube reflectors and three sets of feedback signals, the 3-DOF laser interferometer can calculate the three parameters, i.e., the axial displacement and the lateral pitch and yaw angles. The device is installed on each motion axis of the CMM to monitor 9 major errors during the whole motion system. Laser signals are used to track position information by establishing the rigid body transformation relationship. Therefore, the 9 errors can be updated in real time through the monitoring system to replace the calibration results to calculate the probe position. The position error of the CMM probe caused by the dynamic error is simulated. Monte Carlo method is employed to obtain the error situation and monitor the residual error distribution throughout the measurement movement process. The errors can be corrected immediately without recalibrating the CMM error parameters especially when the dynamic error changes significantly. In addition, environmental errors are also introduced in the model to analyze the impact on the accuracy of position monitoring. The method proposed can reduce the position monitoring error within 0.1 μm. Using this method, the error source of a dynamic error monitoring system can be designed in a simulated environment, which can be used as the basis for the design of the dynamic error monitoring system.

Citation Download Citation

Haoyu Lyu and Lingbao Kong "Modeling and simulation of dynamic errors in a coordinate measuring machine with 3-DOF laser interferometer", Proc. SPIE 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing, 115681L (5 November 2020); https://doi.org/10.1117/12.2580162

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Interferometers

Monte Carlo methods

Environmental monitoring

Error analysis

Motion models

Humidity

Refractive index

Show All Keywords

Keywords/Phrases

Search In:

Publication Years