Large-area, uniform light field generated using a galvo scanning system for bi-directional reflectance distribution function measurement

Yinuo Xu; Yingwei He; Xufeng Jing; Xiangliang Liu; Yangting Fu; Yingce Wang; Guojin Feng; Houping Wu; Chundi Zheng; Haiyong Gan

doi:10.1117/12.2575385

10 October 2020 Large-area, uniform light field generated using a galvo scanning system for bi-directional reflectance distribution function measurement

Yinuo Xu, Yingwei He, Xufeng Jing, Xiangliang Liu, Yangting Fu, Yingce Wang, Guojin Feng, Houping Wu, Chundi Zheng, Haiyong Gan

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Proceedings Volume 11552, Optical Metrology and Inspection for Industrial Applications VII; 115520K (2020) https://doi.org/10.1117/12.2575385
Event: SPIE/COS Photonics Asia, 2020, Online Only

Abstract

The wavelength range of a femtosecond laser system can be extended to cover 190 nm ~ 4000 nm via optical parametric oscillation and various harmonic generation processes starting from a Ti:Sapphire mode-locked femtosecond pulsed laser. The laser beams can be well adjusted to be coupled to a galvo scanning system to generate a large-area, uniform light field which is highly suitable for the bi-directional reflectance distribution function (BRDF) measurement of the surface of a large-size objective. The scanning route was carefully designed with a few sub-cycles to provide the same illumination time over different spots on the measurement surface. The irradiance of the light field @ 532 nm was measured using a silicon photodiode with an integration time in the range of 0.1 s ~ 10 s and the non-uniformity was measured to be < 4% over a 60 mm × 60 mm area. The integration time of the radiance sensor for the BRDF measurement sensor was adjusted in the range of 0.1 s ~ 10 s, as well, and the BRDF of a 60 mm × 60 mm surface can be achieved with a standard uncertainty of 5%.

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Yinuo Xu, Yingwei He, Xufeng Jing, Xiangliang Liu, Yangting Fu, Yingce Wang, Guojin Feng, Houping Wu, Chundi Zheng, and Haiyong Gan "Large-area, uniform light field generated using a galvo scanning system for bi-directional reflectance distribution function measurement", Proc. SPIE 11552, Optical Metrology and Inspection for Industrial Applications VII, 115520K (10 October 2020); https://doi.org/10.1117/12.2575385

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