Freeform surface measurement with non-null interferometry

Qun Hao; Yao Hu; Xu Chang; Ting Zhou

doi:10.1117/12.2573384

10 October 2020 Freeform surface measurement with non-null interferometry

Qun Hao, Yao Hu, Xu Chang, Ting Zhou

Proceedings Volume 11548, Optical Design and Testing X; 115480L (2020) https://doi.org/10.1117/12.2573384
Event: SPIE/COS Photonics Asia, 2020, Online Only

Abstract

Freeform surfaces have drawn intensive attention in optical imaging and illumination field because of its great flexibility in optical design. However, the fabrication and testing of freeform surfaces remain a great challenge due to the arbitrary shape. Interferometry is among the high-accuracy testing method of optical surfaces. How to generate a non-rotationally symmetric wavefront similar with the surface under test and retrieve the phase from dense interferogram are hotspot issues. In this paper, we introduce two key technologies in non-null interferometry to solve the above-mentioned problems. The first is the design method of an off-axis catadioptric non-null compensator including a deformable mirror. The second is phase retrieval of single dense interferogram with digital moiré phase shifting interferogram and wavelet analysis. Simulations demonstrate the feasibility of the proposed method.

Conference Presentation

Citation Download Citation

Qun Hao, Yao Hu, Xu Chang, and Ting Zhou "Freeform surface measurement with non-null interferometry", Proc. SPIE 11548, Optical Design and Testing X, 115480L (10 October 2020); https://doi.org/10.1117/12.2573384

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