Silicon (111) chiral structures fabricated by illumination of optical vortex

Ablimit Ablez; Katsuhiko Miyamoto; Ryuji Morita; Takashige Omatsu

doi:10.1117/12.2573778

15 June 2020 Silicon (111) chiral structures fabricated by illumination of optical vortex

Ablimit Ablez, Katsuhiko Miyamoto, Ryuji Morita, Takashige Omatsu

Proceedings Volume 11522, Optical Manipulation and Structured Materials Conference 2020; 1152219 (2020) https://doi.org/10.1117/12.2573778
Event: SPIE Technologies and Applications of Structured Light, 2020, Yokohama, Japan

Abstract

We investigate the structures on a silicon (111) substrate produced by illumination of optical vortex. The fabricated structures on silicon (111) exhibit polycrystalline properties associated with rather complicated 7×7 constructed surface.

Citation Download Citation

Ablimit Ablez, Katsuhiko Miyamoto, Ryuji Morita, and Takashige Omatsu "Silicon (111) chiral structures fabricated by illumination of optical vortex", Proc. SPIE 11522, Optical Manipulation and Structured Materials Conference 2020, 1152219 (15 June 2020); https://doi.org/10.1117/12.2573778

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