Refractive optics based x-ray reflecto-interferometry

S. Lyatun; I. Lyatun; D. Zverev; O. Konovalov; I. Snigireva; A. Snigirev

doi:10.1117/12.2567988

21 August 2020 Refractive optics based x-ray reflecto-interferometry

S. Lyatun, I. Lyatun, D. Zverev, O. Konovalov, I. Snigireva, A. Snigirev

Proceedings Volume 11491, Advances in X-Ray/EUV Optics and Components XV; 114910N (2020) https://doi.org/10.1117/12.2567988
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

A new X-ray Reflecto-Interferometry (XRI) technique is proposed and realized for thin-film characterization. The XRI employs refractive optics that produce a converging fan of radiation, incident onto a sample surface, and a high-resolution CCD detector, which simultaneously collects the reflecto-interferogram over a wide angular range. The functional capabilities of the new method were experimentally tested at the ESRF ID06, and ID10 beamlines in the X-ray energy range from 14 keV to 22 keV. The free-standing Si3N4 membranes with different thickness were studied. The main advantages and possible future applications of the proposed reflecto-interferometry are discussed.

Citation Download Citation

S. Lyatun, I. Lyatun, D. Zverev, O. Konovalov, I. Snigireva, and A. Snigirev "Refractive optics based x-ray reflecto-interferometry", Proc. SPIE 11491, Advances in X-Ray/EUV Optics and Components XV, 114910N (21 August 2020); https://doi.org/10.1117/12.2567988

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available