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21 August 2020 Numerical integration of slope data with application to deflectometry
Ana H. Ramirez-Andrade, Rosario Porras-Aguilar, Konstantinos Falaggis
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Proceedings Volume 11490, Interferometry XX; 1149009 (2020) https://doi.org/10.1117/12.2570600
Event: SPIE Optical Engineering + Applications, 2020, Online Only
Abstract
This work presents a stable noise-robust numerical integration technique derived from a gradient representation of the Q-Forbes polynomials for surfaces with axial symmetry. This modal-integration technique uses an orthogonalization process through the Householder reflections to obtain a numerically orthogonal set for the surface slopes that is used to reconstruct the surface shape. It is shown that for typical Deflectometry measurements, the resulting random component of the uncertainty after numerical integration has a root mean square error well below 1nm.
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Ana H. Ramirez-Andrade, Rosario Porras-Aguilar, and Konstantinos Falaggis "Numerical integration of slope data with application to deflectometry", Proc. SPIE 11490, Interferometry XX, 1149009 (21 August 2020); https://doi.org/10.1117/12.2570600
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KEYWORDS
Deflectometry
Numerical integration
Optics manufacturing
Aspheric metrology
Optical metrology
Optical testing
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