Manufacturing of optical elements by non-contact laser processing

Simon Schwarz; Stefan Rung; Cemal Esen; Ralf Hellmann

doi:10.1117/12.2564713

8 July 2020 Manufacturing of optical elements by non-contact laser processing

Simon Schwarz, Stefan Rung, Cemal Esen, Ralf Hellmann

Proceedings Volume 11478, Seventh European Seminar on Precision Optics Manufacturing; 1147803 (2020) https://doi.org/10.1117/12.2564713
Event: Seventh European Seminar on Precision Optics Manufacturing, 2020, Teisnach, Germany

Abstract

We report on a photonic process chain to manufacture optical elements by non-contact all laser based micro-processing. Firstly, pre-defined optics geometries are generated by high-precision 1030 nm femtosecond layer-by-layer ablation. In order to meet high surface quality requirements, inevitable stipulated for optical use, the surface of thus generated elements has to be smoothened by subsequent 10.6 μm CO₂ laser polishing. To demonstrate this surface finishing process, a complex optic geometry i.e. an axicon array consisting of 37 individual axicons is fabricated within 23 minutes while the polishing shows a reduction of the surface roughness from 0.36 μm to 48 nm. The functionality of the fabricated optic is tested using the 1030 nm wavelength ultrashort pulsed laser. Several sub-Bessel beams exhibiting the typical zeroth-order Bessel beam intensity distribution are observed, in turn confirming the applied manufacturing process to be well applicable for the fabrication of complex optic geometries. Cross sections of the quasi-Bessel beam at the axicon in the middle of the array in both, x- and y-direction, show an almost identical intensity profile, indicating the high contour accuracy of the axicon. Detailed investigations of the axicon in the middle of the array show a tip rounding of 1.37 mm while the sub-beam behind this axicon is measured to have a diameter of 9.5 μm (FWHM) and a Bessel range in propagation direction of 8.0 mm (FWHM).

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Simon Schwarz, Stefan Rung, Cemal Esen, and Ralf Hellmann "Manufacturing of optical elements by non-contact laser processing", Proc. SPIE 11478, Seventh European Seminar on Precision Optics Manufacturing, 1147803 (8 July 2020); https://doi.org/10.1117/12.2564713

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KEYWORDS

Axicons

Pulsed laser operation

Optical components

Laser processing

Optics manufacturing

Polishing

Laser ablation

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