Sub-surface damage layer of microchannel plate in optical processing

Jiao Lian; Yuechong Feng; Sanzhao Wang; Puguang Song; Yu Shi; Juan Liu; Zhiheng Fan; Haoyang Yu; Xingze Ge

doi:10.1117/12.2565264

17 April 2020 Sub-surface damage layer of microchannel plate in optical processing

Jiao Lian, Yuechong Feng, Sanzhao Wang, Puguang Song, Yu Shi, Juan Liu, Zhiheng Fan, Haoyang Yu, Xingze Ge

Proceedings Volume 11455, Sixth Symposium on Novel Optoelectronic Detection Technology and Applications; 114556E (2020) https://doi.org/10.1117/12.2565264
Event: Sixth Symposium on Novel Photoelectronic Detection Technology and Application, 2019, Beijing, China

Abstract

Cracks in microchannel plate (MCP) seriously reduce the mechanical and electrical properties of MCP. The generation mechanism of cracks and the structure of sub-surface damage layer were revealed by studying the changes of surface morphology of MCP in optical process and chemical treatment process. The source of cracks appeared in the etching and reduction process is the sub-surface damage layer in the optical process. The damage layer includes cracks and non-uniform strain layer. After slicing, the depth of damage layer visible to optical microscope is within 25μm. During the polishing process, the damage layer is deeper, and there is a non-uniform strain layer with the depth of about 20μm. To avoid the occurrence of cracks, the thickness setting in the slicing process should take into account the slice damage layer, the polishing crack growth layer, and the strain layer.

Citation Download Citation

Jiao Lian, Yuechong Feng, Sanzhao Wang, Puguang Song, Yu Shi, Juan Liu, Zhiheng Fan, Haoyang Yu, and Xingze Ge "Sub-surface damage layer of microchannel plate in optical processing", Proc. SPIE 11455, Sixth Symposium on Novel Optoelectronic Detection Technology and Applications, 114556E (17 April 2020); https://doi.org/10.1117/12.2565264

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available