Investigation Of Superpolished Surfaces By X-Ray Scattering

A. V. Vinogradov; I. A. Artyukov; S. S. Borisova; N. N. Zorev; I. V. Kozhevnikov; I. F. Mikhailov; S. I. Sagitov; A. I. Fedorenko

doi:10.1117/12.961867

27 November 1989 Investigation Of Superpolished Surfaces By X-Ray Scattering

A. V. Vinogradov, I. A. Artyukov, S. S. Borisova, N. N. Zorev, I. V. Kozhevnikov, I. F. Mikhailov, S. I. Sagitov, A. I. Fedorenko

Author Affiliations +

Proceedings Volume 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation; (1989) https://doi.org/10.1117/12.961867
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

We are studying the diffuse scattering occuring when the X-ray beam is reflected by real surface. This diffuse scattering is produced by microroughnesses and other irregularities of a dielectric constant which retain after any method of surface finishing. The fundamental goal of this work is the physics of diffraction at irregular surfaces and interfaces. The results can be applied to the investigation and control of superpolished surfaces which is of interest both for research snd technology.

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A. V. Vinogradov, I. A. Artyukov, S. S. Borisova, N. N. Zorev, I. V. Kozhevnikov, I. F. Mikhailov, S. I. Sagitov, and A. I. Fedorenko "Investigation Of Superpolished Surfaces By X-Ray Scattering", Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); https://doi.org/10.1117/12.961867

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