Accurate 3D coordinate measurement using holographic multipoint technique

Simon Hartlieb; Cihan Erol; Michael Tscherpel; Tobias Haist; Flavio Guerra; Wolfgang Osten; Michael Ringkowski; Oliver Sawodny

doi:10.1117/12.2555372

1 April 2020 Accurate 3D coordinate measurement using holographic multipoint technique

Simon Hartlieb, Cihan Erol, Michael Tscherpel, Tobias Haist, Flavio Guerra, Wolfgang Osten, Michael Ringkowski, Oliver Sawodny

Author Affiliations +

Proceedings Volume 11352, Optics and Photonics for Advanced Dimensional Metrology; 1135203 (2020) https://doi.org/10.1117/12.2555372
Event: SPIE Photonics Europe, 2020, Online Only

Abstract

In this contribution we introduce an imaging based measurement setup, that is able to very accurately measure 3D relative positions between moving light sources. The system consists of two highspeed cameras, one equipped with a telecentric, the other with an endocentric lens. To improve accuracy of image based position detection, each lens is upgraded with a computer-generated-hologram (CGH) to replicate a single object point into a predefined pattern of spots on image plane. By averaging the centers of all replications, noise and other error contributions can be reduced. We will show how to apply image processing using two different approaches. The first approach is based on a tracking algorithm running on CPU reaching 330 fps. The second is a FPGA implementation to process whole images with a speed of 390 fps. Furthermore, we will demonstrate how threedimensional calibration can be done using the Nanomeasurement and Nanopositioning Machine NPMM-200. For the calibration, a three-dimensional multivariate polynomial is used. The standard deviations of residual error in object space for a calibration in a volume of 100 mm × 100 mm × 24 mm are σ_x = 0.367 μm, σ_y = 0.373 μm and σ_z = 0.437 μm (polynomial order = 9).

Conference Presentation

Citation Download Citation

Simon Hartlieb, Cihan Erol, Michael Tscherpel, Tobias Haist, Flavio Guerra, Wolfgang Osten, Michael Ringkowski, and Oliver Sawodny "Accurate 3D coordinate measurement using holographic multipoint technique", Proc. SPIE 11352, Optics and Photonics for Advanced Dimensional Metrology, 1135203 (1 April 2020); https://doi.org/10.1117/12.2555372

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