A multi-pass interferometer for high resolution angular measurement

Wei Li; Sitian Gao; Yushu Shi; Qi Li; Shi Li; Lu Huang

doi:10.1117/12.2542085

13 November 2019 A multi-pass interferometer for high resolution angular measurement

Wei Li, Sitian Gao, Yushu Shi, Qi Li, Shi Li, Lu Huang

Proceedings Volume 11343, Ninth International Symposium on Precision Mechanical Measurements; 1134308 (2019) https://doi.org/10.1117/12.2542085
Event: International Symposium on Precision Mechanical Measurements 2019, 2019, Chongqing, China

Abstract

Angular displacement mechanisms are widely used in X-ray diffraction and the nrad resolution is essential for high resolution X-ray diffractor. A multi-pass differential interferometer is designed to improve the resolution of the angel to ~ 10 nrad by increasing the optical pass length. For common interferometer based on Michelson interferometry, nonlinearity is caused by phase mixing due to the imperfect of polarization optical components in both homodyne and heterodyne interferometers. In this angular measurement interferometer, the laser beam of the reference path and measuring path are separated to eliminate the mixture and to reduce the nonlinearity. The four-pass design of the reference and measuring beam improve the resolution. The performance of the interferometer can be used measure the small angle generated by compact piezo driven flexure hinge stage.

Citation Download Citation

Wei Li, Sitian Gao, Yushu Shi, Qi Li, Shi Li, and Lu Huang "A multi-pass interferometer for high resolution angular measurement", Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 1134308 (13 November 2019); https://doi.org/10.1117/12.2542085

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