Paper
18 December 2019 New generation magnetorheological finishing polishing machines using robot arm
Longxiang Li, Jianwei Zhang, Chi Song, Xin Zhang, Xiaolin Yin, Donglin Xue
Author Affiliations +
Proceedings Volume 11341, AOPC 2019: Space Optics, Telescopes, and Instrumentation; 1134118 (2019) https://doi.org/10.1117/12.2544325
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China
Abstract
Magnetorheological Finishing (MRF) is widely regarded as an effective means of processing aspheric optical components. We developed a MRF polishing machine based on a robot arm. Compared to the traditional MRF polishing machines, our new generation machines are more flexible, cost-effective and efficient. The basic components of were introduced and the calculating angle was transformed. We processed a flat SiC mirror and the final accuracy is 0.012λ.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Longxiang Li, Jianwei Zhang, Chi Song, Xin Zhang, Xiaolin Yin, and Donglin Xue "New generation magnetorheological finishing polishing machines using robot arm", Proc. SPIE 11341, AOPC 2019: Space Optics, Telescopes, and Instrumentation, 1134118 (18 December 2019); https://doi.org/10.1117/12.2544325
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KEYWORDS
Magnetorheological finishing

Polishing equipment

Mirrors

Silicon

Aspheric lenses

Control systems

Optical components

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