The manufacture of depolarizer in transform system of immersion photolithography polarization state

Mei-Xuan Li; Hong Li; Si-Qi Zhang; Ming Guo

doi:10.1117/12.2544163

18 December 2019 The manufacture of depolarizer in transform system of immersion photolithography polarization state

Mei-Xuan Li, Hong Li, Si-Qi Zhang, Ming Guo

Proceedings Volume 11334, AOPC 2019: Optoelectronic Devices and Integration; and Terahertz Technology and Applications; 113340T (2019) https://doi.org/10.1117/12.2544163
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China

Abstract

To meet the requirements of 45nm node ultraviolet lithography exposure optical system with 193nm wavelength and 1.35 NA for high resolution in extremely large scale integrated circuit. A depolarizer is designed to implement high quality polarization mode lighting on mask surface. In this paper, the depolarizer in the polarization transformation module is designed and the AR film in the depolarizer is developed, combination of two wedge shaped quartz crystals with a diameter of 50±0.2mm is used to realize beam depolarization, with optical axes of two crystals are at an angle of 45 degrees in space. The front one achieves depolarization and the back one compensates optical path. The reflectivity of the prepared AR film is less than 99.5% at 193nm, this depolarizer solved a series of problems caused by the sharp reduction of focal depth due to the increase of NA and the shortening of exposure wavelength, therefore, the development of this depolarizer has certain application value.

Citation Download Citation

Mei-Xuan Li, Hong Li, Si-Qi Zhang, and Ming Guo "The manufacture of depolarizer in transform system of immersion photolithography polarization state", Proc. SPIE 11334, AOPC 2019: Optoelectronic Devices and Integration; and Terahertz Technology and Applications, 113340T (18 December 2019); https://doi.org/10.1117/12.2544163

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Crystals

Polarization

Laser scattering

Refractive index

Transmittance

Antireflective coatings

Deep ultraviolet

Show All Keywords

Keywords/Phrases

Search In:

Publication Years