Laser Interferometer Measurement Systems For Machine Tool Industry And Microelectronics

F. Petra; B. Popela; A. Stejskal; J. Krsek; Z. Vesela; M. Jakl

doi:10.1117/12.961280

3 April 1989 Laser Interferometer Measurement Systems For Machine Tool Industry And Microelectronics

F. Petra, B. Popela, A. Stejskal, J. Krsek, Z. Vesela, M. Jakl

Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961280
Event: Interferometry '89, 1989, Warsaw, Poland

Abstract

Three laser interference measuring systems based on the Michelson interferometer with a single-frequency He-Ne laser are described. The system for machine-tool industry measures lengths with the resolution of 0.1 μm, velocities, small angles, straightness and flatness. The miniature laser interference system was intended to be built in measuring and testing machines. The system for microelectronics measures position in two orthogonal coordinates with the resolution of 40 nm.

Citation Download Citation

F. Petra, B. Popela, A. Stejskal, J. Krsek, Z. Vesela, and M. Jakl "Laser Interferometer Measurement Systems For Machine Tool Industry And Microelectronics", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961280

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