Topography measurement by normal-incidence reflection ptychography

Chao Tang; Lu Rong; Fangrui Tan; Bing Li; Dayong Wang; Jie Zhao; Yunxin Wang

doi:10.1117/12.2537963

18 November 2019 Topography measurement by normal-incidence reflection ptychography

Chao Tang, Lu Rong, Fangrui Tan, Bing Li, Dayong Wang, Jie Zhao, Yunxin Wang

Proceedings Volume 11188, Holography, Diffractive Optics, and Applications IX; 1118815 (2019) https://doi.org/10.1117/12.2537963
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

Ptychography is a widely used lensless coherent diffraction imaging approach, in which the complex transmittance function of the object is retrieved from a set of diffraction patterns originating from overlapping sample illumination area. In this paper, we propose a normal-incidence reflection ptychographic system. The sample and detector are located on each side of the beam splitter similarly to Michelson interferometer without reference beam. This system can reveal the topographic structure of reflective samples. Compared with Michelson interferometer based off-axis digital holography, the field-of-view of the proposed reflective ptychography is unlimited by the aperture of the detector.

Citation Download Citation

Chao Tang, Lu Rong, Fangrui Tan, Bing Li, Dayong Wang, Jie Zhao, and Yunxin Wang "Topography measurement by normal-incidence reflection ptychography", Proc. SPIE 11188, Holography, Diffractive Optics, and Applications IX, 1118815 (18 November 2019); https://doi.org/10.1117/12.2537963

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