Paper
20 September 1989 Bimorph PZT Active Mirror
Fred F. Forbes
Author Affiliations +
Abstract
Using microelectronics, a 37-element hex pattern has been deposited on a thin PZT bimorph consisting of two wafers which produce changes in curvature with voltage applied to individual facets. The fabrication and optical performance of these devices are described, together with utilization schemes for atmospheric wavefront restoration based on rapid curvature sensing and correction.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fred F. Forbes "Bimorph PZT Active Mirror", Proc. SPIE 1114, Active Telescope Systems, (20 September 1989); https://doi.org/10.1117/12.960819
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Semiconducting wafers

Ferroelectric materials

Detector arrays

Quantum efficiency

Wafer-level optics

Wavefront sensors

Atmospheric optics

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