New surface slope profiler with sub-millimeter spatial resolution

Fugui Yang; Ming Li; Quan Cai; Weifan Sheng; Peng Liu; Xiaowei Zhang

doi:10.1117/12.2525488

9 September 2019 New surface slope profiler with sub-millimeter spatial resolution

Fugui Yang, Ming Li, Quan Cai, Weifan Sheng, Peng Liu, Xiaowei Zhang

Proceedings Volume 11109, Advances in Metrology for X-Ray and EUV Optics VIII; 111090O (2019) https://doi.org/10.1117/12.2525488
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

In order to give a complete evaluation of the beamline’s performance, x-ray mirrors should be measured by advanced surface metrology technique. How to improve spatial resolution of the surface profilers with long trace is one of the important issues for metrology lab. In this paper, we present our newly developed surface slope profiler with focused beam to sample the surface under test. This system has capability to measure precision optics with both high accuracy and spatial resolution. The systematic error of the instrument is also improved for large aperture footprint in the focusing lens considering the lateral beam shift effect. The characterization experiments of the optical head and the scanning measurement of the sample have been carried out to verify the performance of the profiler with accuracy of sub-100 nrad.

Conference Presentation

Citation Download Citation

Fugui Yang, Ming Li, Quan Cai, Weifan Sheng, Peng Liu, and Xiaowei Zhang "New surface slope profiler with sub-millimeter spatial resolution", Proc. SPIE 11109, Advances in Metrology for X-Ray and EUV Optics VIII, 111090O (9 September 2019); https://doi.org/10.1117/12.2525488

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