1Friedrich-Schiller-Univ. Jena (Germany) 2Fraunhofer Institute for Applied Optics and Precision Engineering IOF (Germany) 3Max Planck School of Photonics (Germany)
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Thomas Pertsch
"Metrology for and with nanooptics (Conference Presentation)", Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 1105704 (2 August 2019); https://doi.org/10.1117/12.2534351
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Thomas Pertsch, "Metrology for and with nanooptics (Conference Presentation)," Proc. SPIE 11057, Modeling Aspects in Optical Metrology VII, 1105704 (2 August 2019); https://doi.org/10.1117/12.2534351