Paper
15 March 2019 Electric-field-induced domain switching and pinning state in lead-free ferroelectric BST 80/20 film
Author Affiliations +
Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110221C (2019) https://doi.org/10.1117/12.2521808
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation
Abstract
Ferroelectric nanodomains were created in Ba0.8Sr0.2TiO3 (BST 80/20) thin films by applying a voltage to a sharp conducting tip of a scanning probe microscope (SPM). The ferroelectric layer were grown on (100)-oriented silicon substrate by radio frequency magnetron sputtering. The surface of the sample shows small grains which diameter ranges from 50 nm to 75 nm and roughness is less than 5 nm. Using the piezoresponse mode of the SPM to detect the out-ofplane film polarization, the domain sizes were measured as a function of the applied writing voltage and the pulse time. It was found that the time dependence of the domain diameter in a 400 nm thick BST 80/20 film well described by logarithmic law observed earlier in Pb(Zr0.2Ti0.8)O3 (PZT) films. The dynamics of domain growth is analyzed theoretically taking into account the strong inhomogeneity of the external electric field in the film and the influence of the bottom electrode. Therefore, the BTS film with good polarization switching properties could act as a memory element in nonvolatile ferroelectric random access memory (NV-FRAM) devices.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mikhail S. Afanasiev, Galina V. Chucheva, and Dmitry A. Kiselev "Electric-field-induced domain switching and pinning state in lead-free ferroelectric BST 80/20 film", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110221C (15 March 2019); https://doi.org/10.1117/12.2521808
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KEYWORDS
Switching

Thin films

Polarization

Scanning probe microscopy

Silicon

Barium

Dielectric polarization

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