A low actuation voltage MEMS switch with protection against stiction

Ilia V. Uvarov; Alexander N. Kupriyanov

doi:10.1117/12.2520838

15 March 2019 A low actuation voltage MEMS switch with protection against stiction

Ilia V. Uvarov, Alexander N. Kupriyanov

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 110220P (2019) https://doi.org/10.1117/12.2520838
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

High actuation voltage and low reliability due to the stiction phenomenon limits the commercial success of microelectromechanical systems (MEMS) switches. This paper presents a single-pole double-throw MEMS switch with the pull-in voltage as low as 4.9 V. At the same time, the device is equipped with the mechanism that protects it from stiction. The switch is based on an aluminum beam suspended by the torsion springs over the driving and signal electrodes. Recovery of the device after stiction in the hot switching conditions is demonstrated. In the cold mode, stiction is not observed at the transmitted DC power up to 25 mW. The proposed design is characterized by the high mechanical reliability. The main reason of failure is an increase of the on-resistance because of contamination of the contacts.

Citation Download Citation

Ilia V. Uvarov and Alexander N. Kupriyanov "A low actuation voltage MEMS switch with protection against stiction", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 110220P (15 March 2019); https://doi.org/10.1117/12.2520838

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