Full-field stress measurement based on phase-shifting ptychographic iterative engine

Bei Cheng; Xuejie Zhang; Cheng Liu; Jianqiang Zhu

doi:10.1117/12.2506333

15 November 2018 Full-field stress measurement based on phase-shifting ptychographic iterative engine

Bei Cheng, Xuejie Zhang , Cheng Liu, Jianqiang Zhu

Proceedings Volume 10964, Tenth International Conference on Information Optics and Photonics; 109645D (2018) https://doi.org/10.1117/12.2506333
Event: Tenth International Conference on Information Optics and Photonics (CIOP 2018), 2018, Beijing, China

Abstract

Stress measurement is significant to evaluate and predict optical behaviour of the birefringence components. The separation of two principal stress components is a difficult problem due to the coupling between them. A new PIE-based stress measurement method is proposed. Combining with the four-step phase-shifting measuring method, the complex amplitude transmittance functions of the sample in different phase-shifting states are reconstructed. Then the quantitative stress birefringence information are extracted respectively from the amplitude information and phase information. This method can achieve the complete stress information measurement and is especially suitable for the large-size samples.

Citation Download Citation

Bei Cheng, Xuejie Zhang , Cheng Liu, and Jianqiang Zhu "Full-field stress measurement based on phase-shifting ptychographic iterative engine", Proc. SPIE 10964, Tenth International Conference on Information Optics and Photonics, 109645D (15 November 2018); https://doi.org/10.1117/12.2506333

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KEYWORDS

Phase shifts

Polarization

Birefringence

Diffraction

Reconstruction algorithms

Transmittance

Polarizers

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