Maskless fabrication of multifocal microlens arrays on silica glass by multi-step laser-tunable wet etching method

Yan Ou; Jinwen Qian; Yifeng Xiao; Liang Wu; Yangfei Xu; Minghua Zhang

doi:10.1117/12.2505092

15 November 2018 Maskless fabrication of multifocal microlens arrays on silica glass by multi-step laser-tunable wet etching method

Yan Ou, Jinwen Qian, Yifeng Xiao, Liang Wu, Yangfei Xu, Minghua Zhang

Author Affiliations +

Proceedings Volume 10964, Tenth International Conference on Information Optics and Photonics; 1096417 (2018) https://doi.org/10.1117/12.2505092
Event: Tenth International Conference on Information Optics and Photonics (CIOP 2018), 2018, Beijing, China

Abstract

This paper reports a simple method of creating multifocal microlens arrays on silica glass. The method involves the multi-step femtosecond-laser exposures followed by a chemical wet-etching process on silica glass, which enable fabrication of multi-layers concentric microstructures with high-quality and smooth curved surfaces. The flexibility of the maskless process was demonstrated in tuning the shape and depth of the multilayer concave structures by the arrangements of the laser exposure energy and chemical etching time. In addition, microlenses with different layers were fabricated and the results revealed their high surface quality and good optical property in creating multi-focus.

Citation Download Citation

Yan Ou, Jinwen Qian, Yifeng Xiao, Liang Wu, Yangfei Xu, and Minghua Zhang "Maskless fabrication of multifocal microlens arrays on silica glass by multi-step laser-tunable wet etching method", Proc. SPIE 10964, Tenth International Conference on Information Optics and Photonics, 1096417 (15 November 2018); https://doi.org/10.1117/12.2505092

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