Presentation + Paper
4 March 2019 Infrared analyzer with MEMS microspectrometer optimized for handheld explosive gas detection
Doris Mutschall, Martin Gorek, Martin Ebermann, Rainer Krage, Norbert Neumann
Author Affiliations +
Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 1093106 (2019) https://doi.org/10.1117/12.2507847
Event: SPIE OPTO, 2019, San Francisco, California, United States
Abstract
This paper presents a compact handheld gas analyzer, optimized for the multicomponent analysis of hydrocarbon gases, based on a micromachined, tunable Fabry-Pérot filter (μFPF) as a key element. The tuning range from 3.0 μm to 3.7 μm and spectral resolution of 30 to 40 nm (FWHM) cover a region of characteristic absorption of many combustible hydrocarbons and allow an accurate measurement of the concentration of each individual gas. The analyzer functions like a microspectrometer and outperforms the current state of the art for small gas detection handheld devices, using pellistors and NDIR-infrared detectors.

An innovative MEMS design with two movable reflectors is insensitive to acceleration forces. Due to the handheld application, especially the vibration response in the frequency range of 10 to 100 Hz was carefully characterized. An uncooled photodiode is integrated as fast detector, together with a transimpedance amplifier and a sapphire lens for light concentration. The photodiode is working in photovoltaic mode without supply voltage. In comparison to a photoresistor this gives the advantages of less power consumption and compatibility to explosion protection regulations.

A demonstrator was developed by designing a smart sensor module including complex analog and digital signal processing. Integrating this into a commercial, handheld, explosion-proofed Multi-Gas-Detector model results in a robust instrument, which enables field tests under harsh environmental conditions, typical for fire brigade missions. Spectral analysis of combustible gases (methane, ethane, propane and acetylene) is demonstrated with focus on safety-relevant LEL (lower explosion level) detection.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Doris Mutschall, Martin Gorek, Martin Ebermann, Rainer Krage, and Norbert Neumann "Infrared analyzer with MEMS microspectrometer optimized for handheld explosive gas detection", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 1093106 (4 March 2019); https://doi.org/10.1117/12.2507847
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CITATIONS
Cited by 1 scholarly publication.
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KEYWORDS
Sensors

Gases

Photodiodes

Infrared radiation

Absorption

Explosives

Bulk micromachining

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