High resolution volumetric stimulated Raman scattering (V-SRS) imaging allows a precise measurement of chemical distribution in a three-dimensional (3-D) complex biological system. To compile a stack of multiplane images, current methods such as using piezo objective positioners or tunable lenses either yield low scanning speed, disturbance of specimen, or significant aberrations. Here, we develop a V-SRS microscope with a high-speed MEMS deformable mirror (DM) which has 140 actuators and a frame rate of 20 kHz using hardware-trigger. The DM conjugated with the objective pupil plane enables wavefront shaping at reflectance mode and remote focusing of both pump and Stokes beams on the sample. The depth scan range can reach tens of micrometers by using 40X and 25X objectives. Multiple 3-D cancerous cell images are obtained. We expect the V-SRS to have great potential to enable label-free studies of cell metabolism, brain function, and developmental biology.
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